The dry etching lab at Bristol is concerned with all aspects of plasma chemistry, especially with regard to dry etching of semiconductor materials. We presently have 1 reactive ion etcher, based on the Electrotech Omega 2, which is used for a variety of projects. Nowadays, we are mainly concentrating on the deposition of CVD diamond and DLC films, but we still perform the occassional dry etch project. Recent studies have included:
More details of these are given on the references page.
Back to Physical Chemistry Home page, or Bristol University Chemistry Dept Home Page.
. Paul May