Etching processDry Etching Research Lab

Bristol University, School of Chemistry

The dry etching lab at Bristol is concerned with all aspects of plasma chemistry, especially with regard to dry etching of semiconductor materials. We presently have 1 reactive ion etcher, based on the Electrotech Omega 2, which is used for a variety of projects. Nowadays, we are mainly concentrating on the deposition of CVD diamond and DLC films, but we still perform the occassional dry etch project. Recent studies have included:

More details of these are given on the references page.


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. Paul May